Amorphous ZnO films grown by room temperature pulsed laser deposition on paper and mylar for transparent electronics applications

D. J. Rogers, V. E. Sandana, F. Hosseini Teherani, R. McClintock, M. Razeghi, H. J. Drouhin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


Recently, there has been a surge of activity in the development of next-generation transparent thin film transistors for use in applications such as electronic paper and flexible organic light emitting diode panels. Amongst the transparent conducting oxides attracting the most interest at present are Amorphous Oxide Semiconductors (AOS) based on ZnO because they exhibit enhanced electron mobility (μ), superior capacity for processability in air and improved thermodynamic stability compared with conventional covalent amorphous semiconductors and existing AOS. Moreover, they give excellent performance when fabricated at relatively low temperature and can readily be made in large area format. Thus, they are projected to resolve the trade-off between processing temperature and device performance and thereby allow fabrication on inexpensive heatsensitive substrates. For the moment, however, an undesireable post-deposition annealing step at a temperature of about 200°C is necessary in order to obtain suitable electrical and optical properties. This paper demonstrates the possibility of directly engineering amorphous ZnO with relatively high conductiviy at room temperature on paper and mylar substrates using pulsed laser deposition.

Original languageEnglish (US)
Title of host publicationOxide-Based Materials and Devices II
StatePublished - Apr 27 2011
EventOxide-Based Materials and Devices II - San Francisco, CA, United States
Duration: Jan 23 2011Jan 26 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOxide-Based Materials and Devices II
Country/TerritoryUnited States
CitySan Francisco, CA


  • Amorphous Oxide Semiconductors
  • Mylar Substrate
  • Paper Substrate
  • Room Temperature Pulsed Laser Deposition
  • Thin Film Transistor
  • Transparent Conducting Oxide
  • Transparent Electronics
  • ZnO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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