TY - JOUR
T1 - An atom-probe field-ion microscope for the study of the interaction of impurity atoms or alloying elements with defects
AU - Wagner, Alfred
AU - Hall, Thomas M.
AU - Seidman, David N.
N1 - Funding Information:
* Research supported by the Energy Research and Develop-ment Administration. Additional support was received from the National Science Foundation through the use of the technical facilities of the Materials Science Center at Cornell University. t Now at Bell Laboratories, 555 Union Boulevard, Allentown, Pennsylvania 18103, USA.
PY - 1978/2
Y1 - 1978/2
N2 - A time-of-flight (TOP) atom- probe field-ion microscope (FIM) designed for the study of defects is described. This atom probe features: 1. (1) a variable magnification internal-image-intensification system; 2. (2) a liquid-helium goniometer stage; 3. (3) a low-energy (≤3 keV) gas-ion gun for in-situ irradiations; 4. (4) an ultra-high vacuum (≈3 × 10-10 torr) chamber; 5. (5) a high vacuum (≈10-6 Torr) specimen-exchange device; 6. (6) a Chevron ion detector; an 7. (7) an eight-channel digital timer with a ±10 ns resolution for measuring the TOFs. The entire process of applying the evaporation pulse to the specimen, measuring the voltages, and analyzing the TOF data is controlled by a computer. With this system we can record and analyze 600 TOF/min. Results on unirradiated specimens of molybdenum, tungsten, W-25 at% Re, Mo-1.0 at% Ti, Mo-1.0 at% Ti-0.08 at% Zr and a special low swelling stainless steel alloy (LS1A) demonstrate the instrument's ability to determine quantitatively concentrations at the 5 × 10-4 at fr level and to determine their spatial distribution with a resolution of a few angstroms.
AB - A time-of-flight (TOP) atom- probe field-ion microscope (FIM) designed for the study of defects is described. This atom probe features: 1. (1) a variable magnification internal-image-intensification system; 2. (2) a liquid-helium goniometer stage; 3. (3) a low-energy (≤3 keV) gas-ion gun for in-situ irradiations; 4. (4) an ultra-high vacuum (≈3 × 10-10 torr) chamber; 5. (5) a high vacuum (≈10-6 Torr) specimen-exchange device; 6. (6) a Chevron ion detector; an 7. (7) an eight-channel digital timer with a ±10 ns resolution for measuring the TOFs. The entire process of applying the evaporation pulse to the specimen, measuring the voltages, and analyzing the TOF data is controlled by a computer. With this system we can record and analyze 600 TOF/min. Results on unirradiated specimens of molybdenum, tungsten, W-25 at% Re, Mo-1.0 at% Ti, Mo-1.0 at% Ti-0.08 at% Zr and a special low swelling stainless steel alloy (LS1A) demonstrate the instrument's ability to determine quantitatively concentrations at the 5 × 10-4 at fr level and to determine their spatial distribution with a resolution of a few angstroms.
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U2 - 10.1016/0022-3115(78)90257-X
DO - 10.1016/0022-3115(78)90257-X
M3 - Article
AN - SCOPUS:0017930573
SN - 0022-3115
VL - 69-70
SP - 413
EP - 423
JO - Journal of Nuclear Materials
JF - Journal of Nuclear Materials
IS - C
ER -