TY - GEN
T1 - An efficient algorithm for stencil planning and optimization in E-Beam lithography
AU - Ge, Jiabei
AU - Yan, Changhao
AU - Zhou, Hai
AU - Zhou, Dian
AU - Zeng, Xuan
N1 - Funding Information:
This research was supported partly by National Science Foundation of China research projects 61376040, 61574046, 61274032, 61674042, 61574044, partly by NSF Grants 1441695 and 1533656, and partly by the Recruitment Program of Global Experts (the Thousand Talents Plan).
PY - 2017/2/16
Y1 - 2017/2/16
N2 - Character projection is a promising technique to dramatically improve throughput of E-beam lithography. However, its effectiveness depends on how good the stencils are planned and optimized. Recently Kuang and Young proposed an efficient heuristic based on 2-D bin-packing for the stencil optimization. In this paper, we identified drawbacks in their approaches, and developed a better algorithm that reduces the shot numbers to less than half of theirs in average. The key point is introducing the merit frequency/area (f/A) to select candidate characters and proposing an accurate and efficient algorithm to estimate the occupied area of characters before placement. Experimental results verify the effectiveness of the proposed method.
AB - Character projection is a promising technique to dramatically improve throughput of E-beam lithography. However, its effectiveness depends on how good the stencils are planned and optimized. Recently Kuang and Young proposed an efficient heuristic based on 2-D bin-packing for the stencil optimization. In this paper, we identified drawbacks in their approaches, and developed a better algorithm that reduces the shot numbers to less than half of theirs in average. The key point is introducing the merit frequency/area (f/A) to select candidate characters and proposing an accurate and efficient algorithm to estimate the occupied area of characters before placement. Experimental results verify the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=85015263365&partnerID=8YFLogxK
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U2 - 10.1109/ASPDAC.2017.7858350
DO - 10.1109/ASPDAC.2017.7858350
M3 - Conference contribution
AN - SCOPUS:85015263365
T3 - Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC
SP - 366
EP - 371
BT - 2017 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017
Y2 - 16 January 2017 through 19 January 2017
ER -