Abstract
Character projection is a promising technique to dramatically improve throughput of E-beam lithography. However, its effectiveness depends on how good the stencils are planned and optimized. Recently Kuang and Young proposed an efficient heuristic based on 2-D bin-packing for the stencil optimization. In this paper, we identified drawbacks in their approaches, and developed a better algorithm that reduces the shot numbers to less than half of theirs in average. The key point is introducing the merit frequency/area (f/A) to select candidate characters and proposing an accurate and efficient algorithm to estimate the occupied area of characters before placement. Experimental results verify the effectiveness of the proposed method.
| Original language | English (US) |
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| Title of host publication | 2017 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 366-371 |
| Number of pages | 6 |
| ISBN (Electronic) | 9781509015580 |
| DOIs | |
| State | Published - Feb 16 2017 |
| Event | 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017 - Chiba, Japan Duration: Jan 16 2017 → Jan 19 2017 |
Publication series
| Name | Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC |
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Other
| Other | 22nd Asia and South Pacific Design Automation Conference, ASP-DAC 2017 |
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| Country/Territory | Japan |
| City | Chiba |
| Period | 1/16/17 → 1/19/17 |
Funding
This research was supported partly by National Science Foundation of China research projects 61376040, 61574046, 61274032, 61674042, 61574044, partly by NSF Grants 1441695 and 1533656, and partly by the Recruitment Program of Global Experts (the Thousand Talents Plan).
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Computer Science Applications
- Computer Graphics and Computer-Aided Design