Nanoelectromechanical (NEMS) systems fabricated using atomically thin materials have low mass and high stiffness and are thus ideal candidates for force and mass sensing applications. Transition metal dichalcogenides (TMDCs) offer certain unique properties in their few-layered form – such as piezoelectricity and a direct band gap (in some cases) – and are an interesting alternative to graphene based NEMS. Among the demonstrated methods for displacement transduction in NEMS, cavity-interferometry provides exquisite displacement sensitivity. Typically, interferometric measurements are complemented with Raman spectroscopy to characterize the number of layers in 2D materials, and the measurements necessitate high vacuum conditions to eliminate viscous damping. Here, we report an experimental setup that facilitates both Raman spectroscopy and interferometric measurements on few-layered Tungsten Disulfide (WS 2 ) resonators in high vacuum (<10 −5 Torr) conditions.
- 2D materials
- Nanoelectromechanical systems (NEMS)
- Transition metal dichalcogenides (TMDCs)
ASJC Scopus subject areas
- Aerospace Engineering
- Mechanics of Materials
- Mechanical Engineering