An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators

S. S.P. Nathamgari; S. Dong; E. Hosseinian; L. J. Lauhon; H. D. Espinosa

doi:10.1007/s11340-018-00452-5

An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators

S. S.P. Nathamgari, S. Dong, E. Hosseinian, L. J. Lauhon, H. D. Espinosa^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Nanoelectromechanical (NEMS) systems fabricated using atomically thin materials have low mass and high stiffness and are thus ideal candidates for force and mass sensing applications. Transition metal dichalcogenides (TMDCs) offer certain unique properties in their few-layered form – such as piezoelectricity and a direct band gap (in some cases) – and are an interesting alternative to graphene based NEMS. Among the demonstrated methods for displacement transduction in NEMS, cavity-interferometry provides exquisite displacement sensitivity. Typically, interferometric measurements are complemented with Raman spectroscopy to characterize the number of layers in 2D materials, and the measurements necessitate high vacuum conditions to eliminate viscous damping. Here, we report an experimental setup that facilitates both Raman spectroscopy and interferometric measurements on few-layered Tungsten Disulfide (WS ₂ ) resonators in high vacuum (<10 ⁻⁵ Torr) conditions.

Original language	English (US)
Pages (from-to)	349-359
Number of pages	11
Journal	Experimental Mechanics
Volume	59
Issue number	3
DOIs	https://doi.org/10.1007/s11340-018-00452-5
State	Published - Mar 15 2019

Keywords

2D materials
Cavity-interferometry
Nanoelectromechanical systems (NEMS)
Resonator
Transition metal dichalcogenides (TMDCs)

ASJC Scopus subject areas

Aerospace Engineering
Mechanics of Materials
Mechanical Engineering

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@article{1ce03896c44046d1a409aa30836b35c9,

title = "An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators",

abstract = " Nanoelectromechanical (NEMS) systems fabricated using atomically thin materials have low mass and high stiffness and are thus ideal candidates for force and mass sensing applications. Transition metal dichalcogenides (TMDCs) offer certain unique properties in their few-layered form – such as piezoelectricity and a direct band gap (in some cases) – and are an interesting alternative to graphene based NEMS. Among the demonstrated methods for displacement transduction in NEMS, cavity-interferometry provides exquisite displacement sensitivity. Typically, interferometric measurements are complemented with Raman spectroscopy to characterize the number of layers in 2D materials, and the measurements necessitate high vacuum conditions to eliminate viscous damping. Here, we report an experimental setup that facilitates both Raman spectroscopy and interferometric measurements on few-layered Tungsten Disulfide (WS 2 ) resonators in high vacuum (<10 −5 Torr) conditions. ",

keywords = "2D materials, Cavity-interferometry, Nanoelectromechanical systems (NEMS), Resonator, Transition metal dichalcogenides (TMDCs)",

author = "Nathamgari, {S. S.P.} and S. Dong and E. Hosseinian and Lauhon, {L. J.} and Espinosa, {H. D.}",

note = "Funding Information: Acknowledgements H.D.E acknowledges support from Army Research Office (ARO) through Grant# W911NF1510068. The authors would like to thank Dr. Chakrapani Varanasi from ARO for supporting the research program and for his inputs. L.J.L. acknowledges support of the NSF MRSEC through grants DMR-1121262 and DMR-1720139. The authors acknowledge support from the Center for Nanoscale Materials (CNM, Argonne National Lab), an Office of Science user facility, supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357. This work also utilized Northwestern University Micro/Nano Fabrication Facility (NUFAB), which is partially supported by Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), the Materials Research Science and Engineering Center (NSF DMR-1720139), the State of Illinois, and Northwestern University. Publisher Copyright: {\textcopyright} 2018, Society for Experimental Mechanics.",

year = "2019",

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doi = "10.1007/s11340-018-00452-5",

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T1 - An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators

AU - Nathamgari, S. S.P.

AU - Dong, S.

AU - Hosseinian, E.

AU - Lauhon, L. J.

AU - Espinosa, H. D.

N1 - Funding Information: Acknowledgements H.D.E acknowledges support from Army Research Office (ARO) through Grant# W911NF1510068. The authors would like to thank Dr. Chakrapani Varanasi from ARO for supporting the research program and for his inputs. L.J.L. acknowledges support of the NSF MRSEC through grants DMR-1121262 and DMR-1720139. The authors acknowledge support from the Center for Nanoscale Materials (CNM, Argonne National Lab), an Office of Science user facility, supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357. This work also utilized Northwestern University Micro/Nano Fabrication Facility (NUFAB), which is partially supported by Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), the Materials Research Science and Engineering Center (NSF DMR-1720139), the State of Illinois, and Northwestern University. Publisher Copyright: © 2018, Society for Experimental Mechanics.

PY - 2019/3/15

Y1 - 2019/3/15

N2 - Nanoelectromechanical (NEMS) systems fabricated using atomically thin materials have low mass and high stiffness and are thus ideal candidates for force and mass sensing applications. Transition metal dichalcogenides (TMDCs) offer certain unique properties in their few-layered form – such as piezoelectricity and a direct band gap (in some cases) – and are an interesting alternative to graphene based NEMS. Among the demonstrated methods for displacement transduction in NEMS, cavity-interferometry provides exquisite displacement sensitivity. Typically, interferometric measurements are complemented with Raman spectroscopy to characterize the number of layers in 2D materials, and the measurements necessitate high vacuum conditions to eliminate viscous damping. Here, we report an experimental setup that facilitates both Raman spectroscopy and interferometric measurements on few-layered Tungsten Disulfide (WS 2 ) resonators in high vacuum (<10 −5 Torr) conditions.

AB - Nanoelectromechanical (NEMS) systems fabricated using atomically thin materials have low mass and high stiffness and are thus ideal candidates for force and mass sensing applications. Transition metal dichalcogenides (TMDCs) offer certain unique properties in their few-layered form – such as piezoelectricity and a direct band gap (in some cases) – and are an interesting alternative to graphene based NEMS. Among the demonstrated methods for displacement transduction in NEMS, cavity-interferometry provides exquisite displacement sensitivity. Typically, interferometric measurements are complemented with Raman spectroscopy to characterize the number of layers in 2D materials, and the measurements necessitate high vacuum conditions to eliminate viscous damping. Here, we report an experimental setup that facilitates both Raman spectroscopy and interferometric measurements on few-layered Tungsten Disulfide (WS 2 ) resonators in high vacuum (<10 −5 Torr) conditions.

KW - 2D materials

KW - Cavity-interferometry

KW - Nanoelectromechanical systems (NEMS)

KW - Resonator

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ER -

An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators

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Keywords

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