An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches

Keyphrases

• Computational Approach 100%
• Residual Stress 100%
• RF Switch 100%
• Load-deflection Curve 100%
• Residual Stress State 83%
• Membrane Deflection 66%
• Membrane Shape 50%
• Young's Modulus 50%
• Membrane Elastic Properties 33%
• Numerical Simulation 16%
• Commercially Available 16%
• Experimental Dataset 16%
• Iterative Process 16%
• Data Simulation 16%
• State Affect 16%
• Repeatability 16%
• Experiment Test 16%
• Wafer Level 16%
• Accurate Characterization 16%
• Three Dimensional numerical Simulation 16%
• Berkovich Tip 16%
• Large Deflection 16%
• Initial Stress 16%
• Switch number 16%
• Measured Load 16%
• Nanoindenter 16%
• Contrast Variation 16%
• Identification Process 16%
• Deflection 16%

Engineering

• Residual Stress 100%
• Microelectromechanical System 100%
• Radio Frequency 100%
• Stress State 83%
• Load-Deflection Curve 50%
• Young's Modulus 50%
• Elastic Membrane 33%
• Computer Simulation 33%
• Stronger Effect 16%
• Test Experiment 16%
• Repeatability 16%
• Iterative Process 16%