Abstract
We present the results of the development of an in situ end-point detector for a Parylene chemical vapor deposition process. The detector is based on the thermal transfer principle and can be implemented on commercial Parylene deposition systems with minimal system modification. Such a sensor enables a user to stop the deposition when a targeted thickness is reached. The end point detector is very simple to implement on existing Parylene deposition systems. A series of such sensors with different target deposition thickness would allow extraction of the actual deposition rate within a deposition run.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 598-601 |
| Number of pages | 4 |
| State | Published - Jul 23 2003 |
| Event | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: Jan 19 2003 → Jan 23 2003 |
Other
| Other | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
|---|---|
| Country/Territory | Japan |
| City | Kyoto |
| Period | 1/19/03 → 1/23/03 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering