An in-situ end-point detector for parylene CVD deposition

Wongso Sutomo, Xuefeng Wang, David Bullen, Sarah K. Braden, Chang Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'An in-situ end-point detector for parylene CVD deposition'. Together they form a unique fingerprint.

Engineering

INIS