An X-ray diffraction study of epitaxial TiN/NbN superlattices

A. Madan, P. Yashar, M. Shinn, S. A. Barnett*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

X-ray diffraction measurements and simulations were carried out to characterize the composition modulation and structure of TiN/NbN superlattices. A trapezoidal/sawtooth form of the composition wave was assumed. Random d-spacing fluctuations with Gaussian width approximately 0.002 nm and layer thickness variations of 0.1-0.5 nm were incorporated to match the observed broadening of the peaks. Best fits to the experimental data showed that considerable interdiffusion was present, with up to 15 at.% metal substitution within the layers and interface widths of 0.4-2.0 nm. The interface width values agreed well with those used in hardness enhancement calculations for epitaxial TiN/NbN superlattices.

Original languageEnglish (US)
Pages (from-to)147-154
Number of pages8
JournalThin Solid Films
Volume302
Issue number1-2
DOIs
StatePublished - Jun 20 1997

Keywords

  • Nitrides
  • Superlattices
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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