Abstract
A Monte Carlo (MC) simulation model of the GaAs(001) surface has been developed that provides a unified, quantitative explanation of experimental arsenic flash desorption, modulated beam desorption, and steady-state coverage results. The As2 desorption energy EAs decreased with increasing As coverage. EAs = 3.9 eV with a frequency factor of 2 × 1021 s-1 was used isolated As adatom pairs, EAs for As pairs with As neighbors was decreased by 0.12 eV per neighbor. Surface diffusion of gallium with attractive GaGa interactions, leading to flat surfaces during growth or evaporation from the surface, was also necessary to fit the arsenic desorption results. Diffusion of physisorbed Ga and As4 (or As2) was shown to be a necessary element of the model. Most of the parameters needed to simulate GaAs growth have been determined by fitting the desorption results.
Original language | English (US) |
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Pages (from-to) | 146-156 |
Number of pages | 11 |
Journal | Surface Science |
Volume | 241 |
Issue number | 1-2 |
DOIs | |
State | Published - Jan 1 1991 |
Funding
The authors gratefully acknowledge financial support by the National Science Foundation through the Northwestern University Materials Research Center, Grant No. DMR 8821571, and by the Office of Naval Research under contract No. N00014-86-K-0629.
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry