Anisotropic nanoparticles as shape-directing catalysts for the chemical etching of silicon

Guoliang Liu, Kaylie L. Young, Xing Liao, Michelle L. Personick, Chad A. Mirkin*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

40 Scopus citations


Anisotropic Au nanoparticles have been used to create a library of complex features on silicon surfaces. The technique provides control over feature size, shape, and depth. Moreover, a detailed study of the etching rate as a function of the nanoparticle surface facet interfaced with the silicon substrate suggested that the etching is highly dependent upon the facet surface energy. Specifically, the etching rate for Au nanocubes with {100}-terminated facets was ∼1.5 times higher than that for triangular nanoprisms with {111} facets. Furthermore, this work gives fundamental insight into the mechanism of metal-catalyzed chemical etching.

Original languageEnglish (US)
Pages (from-to)12196-12199
Number of pages4
JournalJournal of the American Chemical Society
Issue number33
StatePublished - Aug 21 2013

ASJC Scopus subject areas

  • Catalysis
  • Chemistry(all)
  • Biochemistry
  • Colloid and Surface Chemistry


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