Apodization technique for spurious mode suppression in AlN contour-mode resonators

Marco Giovannini, Serkan Yazici, Nai Kuei Kuo, Gianluca Piazza*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

This paper reports on the application of apodization techniques to 900 MHz-1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1-6]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of aluminum, and a floating bottom electrode made out of platinum sandwiching the AlN film. As also predicted by 3D COMSOL analysis, a complete elimination of the spurious responses (>90% suppression) is attained without significantly impacting the quality factor, Q, and electromechanical coupling coefficient, kt2, of the device. On average, the Q improves except for resonators with thick (220 nm) top electrodes for which <11% degradation in Q is recorded. The kt2 reduction is <20% and it has an absolute value > 1% for all designs.

Original languageEnglish (US)
Pages (from-to)42-50
Number of pages9
JournalSensors and Actuators, A: Physical
Volume206
DOIs
StatePublished - Feb 1 2014
Externally publishedYes

Keywords

  • Aluminum nitride
  • Apodization
  • MEMS
  • Resonator
  • Spurious modes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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