Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators

Marco Giovannini; Serkan Yazici; Nai Kuei Kuo; Gianluca Piazza

doi:10.31438/trf.hh2012.93

Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators

Marco Giovannini^*, Serkan Yazici, Nai Kuei Kuo, Gianluca Piazza

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports, for the first time, on the application of apodization techniques to 900 MHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their Q or electromechanical coupling coefficient, k_t ².

Original language	English (US)
Title of host publication	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Editors	Mehran Mehregany, David J. Monk
Publisher	Transducer Research Foundation
Pages	351-354
Number of pages	4
ISBN (Electronic)	9780964002494
DOIs	https://doi.org/10.31438/trf.hh2012.93
State	Published - 2012
Externally published	Yes
Event	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States Duration: Jun 3 2012 → Jun 7 2012

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Country/Territory	United States
City	Hilton Head
Period	6/3/12 → 6/7/12

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Access to Document

10.31438/trf.hh2012.93

Cite this

Giovannini, M., Yazici, S., Kuo, N. K., & Piazza, G. (2012). Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators. In M. Mehregany, & D. J. Monk (Eds.), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 (pp. 351-354). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2012.93

Giovannini, Marco ; Yazici, Serkan ; Kuo, Nai Kuei et al. / Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators. 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. editor / Mehran Mehregany ; David J. Monk. Transducer Research Foundation, 2012. pp. 351-354 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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title = "Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators",

abstract = "This paper reports, for the first time, on the application of apodization techniques to 900 MHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their Q or electromechanical coupling coefficient, kt 2.",

author = "Marco Giovannini and Serkan Yazici and Kuo, {Nai Kuei} and Gianluca Piazza",

note = "Publisher Copyright: {\textcopyright} 2012 TRF.; 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 ; Conference date: 03-06-2012 Through 07-06-2012",

year = "2012",

doi = "10.31438/trf.hh2012.93",

language = "English (US)",

series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",

publisher = "Transducer Research Foundation",

pages = "351--354",

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booktitle = "2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012",

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Giovannini, M, Yazici, S, Kuo, NK & Piazza, G 2012, Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators. in M Mehregany & DJ Monk (eds), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 351-354, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012, Hilton Head, United States, 6/3/12. https://doi.org/10.31438/trf.hh2012.93

Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators. / Giovannini, Marco; Yazici, Serkan; Kuo, Nai Kuei et al.
2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. ed. / Mehran Mehregany; David J. Monk. Transducer Research Foundation, 2012. p. 351-354 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators

AU - Giovannini, Marco

AU - Yazici, Serkan

AU - Kuo, Nai Kuei

AU - Piazza, Gianluca

PY - 2012

Y1 - 2012

N2 - This paper reports, for the first time, on the application of apodization techniques to 900 MHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their Q or electromechanical coupling coefficient, kt 2.

AB - This paper reports, for the first time, on the application of apodization techniques to 900 MHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their Q or electromechanical coupling coefficient, kt 2.

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BT - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012

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Giovannini M, Yazici S, Kuo NK, Piazza G. Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators. In Mehregany M, Monk DJ, editors, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Transducer Research Foundation. 2012. p. 351-354. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2012.93

Apodization techniques for spurious mode suppression in 900 MHz aluminum nitride contour-mode resonators

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