TY - JOUR
T1 - Applied physics
T2 - Nanoscale imaging of buried structures via scanning near-field ultrasound holography
AU - Shekhawat, Gajendra S.
AU - Dravid, Vinayak P.
PY - 2005/10/7
Y1 - 2005/10/7
N2 - A nondestructive imaging method, scanning near-field ultrasound holography (SNFUH), has been developed that provides depth information as well as spatial resolution at the 10- to 100-nanometer scale. In SNFUH, the phase and amplitude of the scattered specimen ultrasound wave, reflected in perturbation to the surface acoustic standing wave, are mapped with a. scanning probe microscopy platform to provide nanoscale-resolution images of the internal substructure of diverse materials. We have used SNFUH to image buried nanostructures, to perform subsurface metrology in microelectronic structures, and to image malaria parasites in red blood cells.
AB - A nondestructive imaging method, scanning near-field ultrasound holography (SNFUH), has been developed that provides depth information as well as spatial resolution at the 10- to 100-nanometer scale. In SNFUH, the phase and amplitude of the scattered specimen ultrasound wave, reflected in perturbation to the surface acoustic standing wave, are mapped with a. scanning probe microscopy platform to provide nanoscale-resolution images of the internal substructure of diverse materials. We have used SNFUH to image buried nanostructures, to perform subsurface metrology in microelectronic structures, and to image malaria parasites in red blood cells.
UR - http://www.scopus.com/inward/record.url?scp=26444492607&partnerID=8YFLogxK
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U2 - 10.1126/science.1117694
DO - 10.1126/science.1117694
M3 - Article
C2 - 16210534
AN - SCOPUS:26444492607
SN - 0036-8075
VL - 310
SP - 89
EP - 92
JO - Science
JF - Science
IS - 5745
ER -
