Applied physics: Nanoscale imaging of buried structures via scanning near-field ultrasound holography

Gajendra S. Shekhawat, Vinayak P. Dravid*

*Corresponding author for this work

Research output: Contribution to journalArticle

184 Scopus citations

Abstract

A nondestructive imaging method, scanning near-field ultrasound holography (SNFUH), has been developed that provides depth information as well as spatial resolution at the 10- to 100-nanometer scale. In SNFUH, the phase and amplitude of the scattered specimen ultrasound wave, reflected in perturbation to the surface acoustic standing wave, are mapped with a. scanning probe microscopy platform to provide nanoscale-resolution images of the internal substructure of diverse materials. We have used SNFUH to image buried nanostructures, to perform subsurface metrology in microelectronic structures, and to image malaria parasites in red blood cells.

Original languageEnglish (US)
Pages (from-to)89-92
Number of pages4
JournalScience
Volume310
Issue number5745
DOIs
StatePublished - Oct 7 2005

ASJC Scopus subject areas

  • General

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