Approach for efficiently locating and electrically contacting nanostructures fabricated via UHV-STM lithography on Si(100)

M. C. Hersam*, G. C. Abeln, J. W. Lyding

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations

Abstract

The development of atomically precise UHV-STM nanofabrication of metallic, dielectric, and organic nanostructures on Si(100) surfaces has created new opportunities for realizing future nanoelectronic devices. Concomitant with these opportunities are the practical challenges of efficient location/registration of nanostructures and macroscopic-to-nanoscale electrical interfaces. In this paper, we present an approach utilizing p-n junctions to contact nanostructures. The junctions are located potentiometrically and are fully compatible with UHV experimental procedures.

Original languageEnglish (US)
Pages (from-to)235-237
Number of pages3
JournalMicroelectronic Engineering
Volume47
Issue number1
DOIs
StatePublished - Jun 1999
EventProceedings of the 1998 4th International Symposium on New Phenomena in Mesoscopic Structures (NPMS'98) - Kauai, HI, USA
Duration: Dec 7 1998Dec 11 1998

Funding

The authors have benefited from discussions with Prof. Jeff Moore, Prof. Karl Hess, Dr. Janelle Gunther, Dr. Hyungsoo Choi, Dr. Jiutao Li, and Scott Thompson. M. C. Hersam thanks the National Science Foundation for a graduate research fellowship. This work is supported by the Office of Naval Research Multidisciplinary University Research Initiative.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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