Approaches to nanofabrication on Si(100) surfaces: Selective area chemical vapor deposition of metals and selective chemisorption of organic molecules

G. C. Abeln*, M. C. Hersam, D. S. Thompson, S. T. Hwang, H. Choi, J. S. Moore, J. W. Lyding

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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