Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

Xuefeng Wang; L. Vincent; Minfeng Yu; Yonggang Huang; Chang Liu

doi:10.1109/AIM.2003.1225460

Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

Xuefeng Wang, L. Vincent, Minfeng Yu, Yonggang Huang, Chang Liu

Civil and Environmental Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

19 Scopus citations

Abstract

We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.

Original language	English (US)
Title of host publication	Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	891-896
Number of pages	6
ISBN (Electronic)	0780377591
DOIs	https://doi.org/10.1109/AIM.2003.1225460
State	Published - 2003
Event	2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003 - Kobe, Japan Duration: Jul 20 2003 → Jul 24 2003

Publication series

Name	IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Volume	2

Other

Other	2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003
Country/Territory	Japan
City	Kobe
Period	7/20/03 → 7/24/03

Funding

Keywords

Carbon nanotubes
Ion beams
Micromechanical devices
Milling
Nanobioscience
Nanomaterials
Nanostructured materials
Nanowires
Probes
Semiconductor nanostructures

ASJC Scopus subject areas

Control and Systems Engineering
Software
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/AIM.2003.1225460

Cite this

Wang, X., Vincent, L., Yu, M., Huang, Y., & Liu, C. (2003). Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. In Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003 (pp. 891-896). Article 1225460 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AIM.2003.1225460

Wang, Xuefeng ; Vincent, L. ; Yu, Minfeng et al. / Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 891-896 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).

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title = "Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors",

abstract = "We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.",

keywords = "Carbon nanotubes, Ion beams, Micromechanical devices, Milling, Nanobioscience, Nanomaterials, Nanostructured materials, Nanowires, Probes, Semiconductor nanostructures",

author = "Xuefeng Wang and L. Vincent and Minfeng Yu and Yonggang Huang and Chang Liu",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003 ; Conference date: 20-07-2003 Through 24-07-2003",

year = "2003",

doi = "10.1109/AIM.2003.1225460",

language = "English (US)",

series = "IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "891--896",

booktitle = "Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003",

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}

Wang, X, Vincent, L, Yu, M, Huang, Y & Liu, C 2003, Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. in Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003., 1225460, IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 891-896, 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003, Kobe, Japan, 7/20/03. https://doi.org/10.1109/AIM.2003.1225460

Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. / Wang, Xuefeng; Vincent, L.; Yu, Minfeng et al.
Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003. Institute of Electrical and Electronics Engineers Inc., 2003. p. 891-896 1225460 (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

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AU - Liu, Chang

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N2 - We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.

AB - We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.

KW - Carbon nanotubes

KW - Ion beams

KW - Micromechanical devices

KW - Milling

KW - Nanobioscience

KW - Nanomaterials

KW - Nanostructured materials

KW - Nanowires

KW - Probes

KW - Semiconductor nanostructures

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BT - Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003

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Wang X, Vincent L, Yu M, Huang Y, Liu C. Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. In Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003. Institute of Electrical and Electronics Engineers Inc. 2003. p. 891-896. 1225460. (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM). doi: 10.1109/AIM.2003.1225460

Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

Abstract

Publication series

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Funding

Keywords

ASJC Scopus subject areas

Access to Document

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