Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

Xuefeng Wang, L. Vincent, Minfeng Yu, Yonggang Huang, Chang Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.

Original languageEnglish (US)
Title of host publicationProceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages891-896
Number of pages6
ISBN (Electronic)0780377591
DOIs
StatePublished - Jan 1 2003
Event2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003 - Kobe, Japan
Duration: Jul 20 2003Jul 24 2003

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Volume2

Other

Other2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003
CountryJapan
CityKobe
Period7/20/037/24/03

Keywords

  • Carbon nanotubes
  • Ion beams
  • Micromechanical devices
  • Milling
  • Nanobioscience
  • Nanomaterials
  • Nanostructured materials
  • Nanowires
  • Probes
  • Semiconductor nanostructures

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications
  • Software

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  • Cite this

    Wang, X., Vincent, L., Yu, M., Huang, Y., & Liu, C. (2003). Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors. In Proceedings - 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2003 (pp. 891-896). [1225460] (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AIM.2003.1225460