Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

S. J. Park*, J. Chen, C. Liu, J. G. Eden

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

Original languageEnglish (US)
Pages (from-to)171-172
Number of pages2
JournalElectronics Letters
Volume37
Issue number3
DOIs
StatePublished - Feb 1 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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