Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

S. J. Park; J. Chen; C. Liu; J. G. Eden

doi:10.1049/el:20010086

Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

S. J. Park^*, J. Chen, C. Liu, J. G. Eden

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

Original language	English (US)
Pages (from-to)	171-172
Number of pages	2
Journal	Electronics Letters
Volume	37
Issue number	3
DOIs	https://doi.org/10.1049/el:20010086
State	Published - Feb 1 2001

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1049/el:20010086

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title = "Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes",

abstract = "The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.",

author = "Park, {S. J.} and J. Chen and C. Liu and Eden, {J. G.}",

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AU - Park, S. J.

AU - Chen, J.

AU - Liu, C.

AU - Eden, J. G.

PY - 2001/2/1

Y1 - 2001/2/1

N2 - The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

AB - The fabrication of microdischarge devices having pyramidal Si anodes and metal screen cathodes was demonstrated. It was found that the introduction of a plasma of mesoscopic dimensions into a microelectronics environment results in a hybrid discharge. The screen electrode was found to be primarily responsible for the steep decline in operating voltage and concomitant increase in current.

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Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes

Abstract

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