Arrays of robust carbon nanotube-based NEMS: A combined experimental/computational investigation

Owen Loh, Xiaoding Wei, Krishanu Nandy, Horacio D. Espinosa*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We present an investigation of electrostatically-actuated carbon nanotube-based nanoelectromechanical switches. The primary goal of this study is to create a metric for design of robust, high-cycle devices. Methods for fabricating arrays of freestanding carbon nanotubes are discussed. Parametric studies, both experimental and computational, are then conducted to elucidate the failure mechanisms common to this class of carbon nanotube-based nanoelectromechanical systems, and to identify their point of onset within the design space. Experiments are performed in situ the scanning electron microscope, enabling direct imaging of device operation and the mode of eventual failure. Complimentary dynamic multiphysics finite element simulations of device operation are also presented to investigate the underlying mechanisms of the experimentally-observed failure modes.

Original languageEnglish (US)
Title of host publicationMEMS and Nanotechnology - Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics
PublisherSpringer New York LLC
Number of pages2
ISBN (Print)9781441988249
StatePublished - Jan 1 2011

Publication series

NameConference Proceedings of the Society for Experimental Mechanics Series
ISSN (Print)2191-5644
ISSN (Electronic)2191-5652

ASJC Scopus subject areas

  • Mechanical Engineering
  • Engineering(all)
  • Computational Mechanics


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