Arrays of Silicon Micro/Nanostructures Formed in Suspended Configurations for Deterministic Assembly Using Flat and Roller-Type Stamps

Yumi Yang, Youngkyu Hwang, Hyun A. Cho, Jung Hoon Song, Seong Ju Park, John A. Rogers, Heung Cho Ko

Research output: Contribution to journalArticlepeer-review

58 Scopus citations

Abstract

The ability to create and manipulate large arrays of inorganic semiconductor micro/nanostructures for integration on unconventional substrates provides new possibilities in device engineering. Here, simple methods are described for the preparation of structures of single crystalline silicon in suspended and tethered configurations that facilitate their deterministic assembly using transfer-printing techniques. Diverse shapes (e.g., straight or curved edges), thicknesses (between 55 nm and 3 μm), and sizes (areas of 4000 μm2 to 117 mm2) of structures in varied layouts (regular or irregular arrays, with dense or sparse coverages) can be achieved, using either flat or cylindrical roller-type stamps. To demonstrate the technique, printing with 100% yield onto curved, rigid supports of glass and ceramics and onto thin sheets of plastic is shown. The fabrication of a printed array of silicon p+-i-n+ junction photodiodes on plastic is representative of device-printing capabilities. The ability to create and manipulate large arrays of inorganic semiconductor micro/nanostructures for integration on unconventional substrates provides new possibilities in device engineering. Here, simple methods are described for the preparation of structures of single crystalline silicon in suspended and tethered configurations that facilitate their deterministic assembly using transfer-printing techniques.

Original languageEnglish (US)
Pages (from-to)484-491
Number of pages8
JournalSmall
Volume7
Issue number4
DOIs
StatePublished - Feb 18 2011

Keywords

  • elastomeric transfer
  • perimeter pedestal
  • poly(dimethylsiloxane) stamp
  • roll printing
  • silicon micro/nanostructures

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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