Assembly of micro-optical devices using magnetic actuation

Yong W. Yi, Chang Liu

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


We report a high-yield and high-efficiency assembly technique for three-dimensional micro-optical components, including Fresnel lenses, optical gratings, and comer cube reflectors. The three-dimensional assembly process and the optical performance of the assembled components is presented. The angular displacement of individual microstructures is controlled by varying the volume of the magnetic material and through the addition of a flexural-beam loading mechanism to the hinged microstructure. The normal force caused by the deflection of the beam enhances the stability of these devices after they are assembled. The stability of the corner cube reflector is further enhanced by a hooking mechanism in the microstructure. Tests conducted with a He-Ne laser confirm that the measured performance of the Fresnel lens and optical grating correlate well to the expected theoretical values. We also demonstrate the capability for parallel actuation of large arrays of optical components under a global (wafer scale) external magnetic field.

Original languageEnglish (US)
Pages (from-to)205-211
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number2
StatePublished - Dec 14 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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