Atmosphere influence on in-situ ion beam analysis of thin film growth

Yuping Lin*, Alan R. Krauss, Robert P.H. Chang, Orlando H. Auciello, Dieter M. Gruen, J. Albert Schultz

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

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Keyphrases

Engineering

Material Science

Physics

Chemical Engineering