Atom-probe microanalysis of metallic nanostructured materials

Ross A D MacKenzie, Alfred Cerezo, James S. Conyers, Amanda K. Petford-Long, Sybren J. Sijbrandij, George D W Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


Atom-probe techniques have been used to characterize nanostructured metallic materials prepared by thermal evaporation and by sputtering. Multilayer samples of Fe-Cr have been prepared by sputter deposition and analyzed using the Oxford position-sensitive atom probe. This has made it possible to observe the quality of interfaces in the material, and also accurately determine local compositions at each layer within the multilayer stack. Preliminary experiments aimed at producing dual phase nanocrystalline films by thermal evaporator deposition are also reported.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
PublisherPubl by Materials Research Society
Number of pages6
ISBN (Print)1558991816
StatePublished - 1993
EventProceedings of the 3rd Biennial Meeting of Chemical Perspectives of Microelectronic Materials - Boston, MA, USA
Duration: Nov 30 1992Dec 3 1992

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


OtherProceedings of the 3rd Biennial Meeting of Chemical Perspectives of Microelectronic Materials
CityBoston, MA, USA

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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