Atomic layer controlled growth of SiO2 films using binary reaction sequence chemistry

J. W. Klaus*, A. W. Ott, J. M. Johnson, S. M. George

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

92 Scopus citations

Fingerprint

Dive into the research topics of 'Atomic layer controlled growth of SiO<sub>2</sub> films using binary reaction sequence chemistry'. Together they form a unique fingerprint.

Physics & Astronomy