Atomic Layer Deposition Nucleation on Isolated Self-Assembled Monolayer Functional Groups: A Combined DFT and Experimental Study

Keyphrases

• Alkyl 42%
• Aluminum Oxide 14%
• Atomic Clusters 14%
• Atomic Layer Deposition 100%
• Barrier Film 14%
• Computational Strategies 14%
• Deposition nucleation 100%
• Direct Synthesis 14%
• Energy Barrier 14%
• Functional Group Density 14%
• Functional Groups 100%
• High Efficacy 14%
• Homogeneous nucleation 14%
• Hybrid Organic-inorganic 14%
• Long Alkyl Chain 14%
• Low-temperature Atomic Layer Deposition 14%
• Metal Deposition 14%
• Metal Oxide 28%
• Metal Oxide Clusters 14%
• Metal-oxide-metal 14%
• Mixed Metal Oxides 14%
• MnOx 14%
• Oxide-metal-oxide 14%
• Oxides 14%
• Physisorbed 14%
• Precursor Chemistry 14%
• Reactive Precursor 14%
• Selective Deposition 14%
• Self-assembled Monolayer 100%
• Site-directed 14%
• Tailorable 14%
• Terminal Functional Group 14%
• Thermodynamics 14%
• Trimethylaluminum 14%
• Variable Energy 14%

Material Science

• Al2O3 14%
• Density 14%
• Film 14%
• Metal Oxide 71%
• Nucleation 100%
• Oxide Compound 14%
• Self Assembled Monolayer 100%
• Surface (Surface Science) 14%
• ZnO 14%

Chemical Engineering

• Atomic Layer Deposition 100%
• Film 16%
• Functional Group 100%