Abstract
Residual deep-level defects in vapor-phase epitaxial GaP were determined by transient capacitance spectroscopy. The dominant trap in the temperature range studied occurs at Ec-0.44 eV and was present in concentrations of (0.1-1.6) ×1014 cm-3. Two other traps were observed at the epitaxial-layer-substrate interface with energies of Ec-0.23 eV and Ev+0.51 eV. The capture cross section and concentration of these defects are also presented.
Original language | English (US) |
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Pages (from-to) | 1656-1658 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 48 |
Issue number | 4 |
DOIs | |
State | Published - 1977 |
ASJC Scopus subject areas
- General Physics and Astronomy