Beam skirting effects on energy deposition profile in VP-SEM

B. D. Myers, Z. Pan, Vinayak P Dravid

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1208-1209
Number of pages2
JournalMicroscopy and Microanalysis
Volume14
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 1 2008

ASJC Scopus subject areas

  • Instrumentation

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