Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning

Abel L. Thangawng*, Melody A. Swartz, Matthew R. Glucksberg, Rodney S. Ruoff

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

Abstract

We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bonddetach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.

Original languageEnglish (US)
Pages (from-to)132-138
Number of pages7
JournalSmall
Volume3
Issue number1
DOIs
StatePublished - Jan 2007

Keywords

  • Lithography
  • Microfabrication
  • Patterning
  • Reactive ion etching

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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