Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning

Abel L. Thangawng; Melody A. Swartz; Matthew R. Glucksberg; Rodney S. Ruoff

doi:10.1002/smll.200500418

Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning

Abel L. Thangawng^*, Melody A. Swartz, Matthew R. Glucksberg, Rodney S. Ruoff

^*Corresponding author for this work

Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bonddetach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.

Original language	English (US)
Pages (from-to)	132-138
Number of pages	7
Journal	Small
Volume	3
Issue number	1
DOIs	https://doi.org/10.1002/smll.200500418
State	Published - Jan 2007

Keywords

Lithography
Microfabrication
Patterning
Reactive ion etching

ASJC Scopus subject areas

Biotechnology
Biomaterials
Chemistry(all)
Materials Science(all)

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title = "Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning",

abstract = "We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call {"}bond-detach lithography{"}, was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bonddetach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.",

keywords = "Lithography, Microfabrication, Patterning, Reactive ion etching",

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year = "2007",

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AU - Swartz, Melody A.

AU - Glucksberg, Matthew R.

AU - Ruoff, Rodney S.

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AB - We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bonddetach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.

KW - Lithography

KW - Microfabrication

KW - Patterning

KW - Reactive ion etching

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