Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

R. M. Langford; A. K. Petford-Long

doi:10.1116/1.1368198

Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

R. M. Langford^*, A. K. Petford-Long

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

39 Scopus citations

Abstract

A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

Original language	English (US)
Pages (from-to)	982-985
Number of pages	4
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	3
DOIs	https://doi.org/10.1116/1.1368198
State	Published - May 1 2001

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.1368198

Fingerprint Dive into the research topics of 'Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy'. Together they form a unique fingerprint.

Cite this

@article{7f12ab722dc94c738b3e91e4ee6724ed,

title = "Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy",

abstract = "A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.",

author = "Langford, {R. M.} and Petford-Long, {A. K.}",

year = "2001",

month = may,

day = "1",

doi = "10.1116/1.1368198",

language = "English (US)",

volume = "19",

pages = "982--985",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

AU - Langford, R. M.

AU - Petford-Long, A. K.

PY - 2001/5/1

Y1 - 2001/5/1

N2 - A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

AB - A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

UR - http://www.scopus.com/inward/record.url?scp=0035334045&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035334045&partnerID=8YFLogxK

U2 - 10.1116/1.1368198

DO - 10.1116/1.1368198

M3 - Article

AN - SCOPUS:0035334045

VL - 19

SP - 982

EP - 985

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 3

ER -