Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

R. M. Langford*, A. K. Petford-Long

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

Original languageEnglish (US)
Pages (from-to)982-985
Number of pages4
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number3
DOIs
StatePublished - May 1 2001

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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