Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

R. M. Langford; A. K. Petford-Long

doi:10.1116/1.1368198

Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

R. M. Langford^*, A. K. Petford-Long

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

40 Scopus citations

Abstract

A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

Original language	English (US)
Pages (from-to)	982-985
Number of pages	4
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	3
DOIs	https://doi.org/10.1116/1.1368198
State	Published - May 2001

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1368198

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abstract = "A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.",

author = "Langford, \{R. M.\} and Petford-Long, \{A. K.\}",

year = "2001",

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doi = "10.1116/1.1368198",

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N2 - A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

AB - A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.

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Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy

Abstract

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