Abstract
A procedure enabling milling of both sides of cross section specimen using a low energy argon broad ion beam milling at small angle of incidence is discussed. The lift out technique used in preparation of cross section of specimen and the procedure of broad ion beam milling (BIB) on both side of specimen is described. The high resolution electron microscopy images before and after BIB thinning are taken. This technique is used to taken thickness of damaged layer at sidewalls cross section of specimen.
Original language | English (US) |
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Pages (from-to) | 982-985 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films |
Volume | 19 |
Issue number | 3 |
DOIs | |
State | Published - May 2001 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films