We report on the fabrication and characterization of broadband Bragg filters in microfabricated AlGaAs waveguides. Electron-beam lithography and chemically assisted ion-beam etching were used to fabricate first-order gratings with 250 nm period. Bragg filters with rejection bandwidth ∼15 nm and centered at ∼1.6 μm are demonstrated.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)