Broadband Bragg filter in microfabricated AlGaAs waveguides

R. P. Espindola*, M. K. Udo, D. Y. Chu, S. L. Wu, S. T. Ho, R. C. Tiberio, P. F. Chapman, H. Q. Hou, T. Y. Chang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations


We report on the fabrication and characterization of broadband Bragg filters in microfabricated AlGaAs waveguides. Electron-beam lithography and chemically assisted ion-beam etching were used to fabricate first-order gratings with 250 nm period. Bragg filters with rejection bandwidth ∼15 nm and centered at ∼1.6 μm are demonstrated.

Original languageEnglish (US)
Pages (from-to)241-243
Number of pages3
JournalApplied Physics Letters
Issue number2
StatePublished - 1996

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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