Carbon-hydrogen complexes in vapor phase epitaxial GaN

Gyu Chul Yi*, Bruce W. Wessels

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

66 Scopus citations

Abstract

Carbon-hydrogen complexes in undoped and Mg-doped epitaxial GaN films have been investigated using Fourier transform infrared spectroscopy. Infrared absorption peaks in the Mg-doped material were observed at 2853, 2923, and 2956 cm-1. The absorption peaks are attributed to the symmetric and asymmetric vibrational stretching modes of C-H in CHn (n = 1-3) defect complexes. The carbon-hydrogen complexes were unintentionally incorporated during the Mg-doped GaN film growth. The absorbances of the vibrational modes increased for heavily Mg-doped GaN. Upon annealing at 700 °C for 30 min under nitrogen environment, the complexes decomposed. The origin of the carbon-hydrogen complexes is discussed.

Original languageEnglish (US)
Pages (from-to)357-359
Number of pages3
JournalApplied Physics Letters
Volume70
Issue number3
DOIs
StatePublished - Jan 20 1997

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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