Cascaded Mosfet Embedded Multi-Input Microcantilever

Bio-chem Electronic Sensors Based on Cascaded MOSFET Embedded Microcantilevers NU 2003-072 Inventors Gajendra S. Shekhawat* Vinayak P. Dravid Arvind Srivastava Soo-Hyun Tark Short Description An all-electronic, label- and optics-free bio-chem sensing technology based on Cascaded MOSFET embedded microcantilever. Abstracts A promising sensing technology has been developed at Northwestern using label- and optics-free all-electronic approach for wide variety of bio-molecular and chemical detection and diagnosis. Biomedical and other scientific research areas necessitate competent bio-chem sensors, whereas current available devices fail to satisfy this need due to insufficient performance and technology disadvantages, such as large size, low sensitivity and incompatibility with standard CMOS technology. Northwestern's novel bio-chem sensors overcome these disadvantages by developing cascaded micro-cantilevers with metal-oxide semiconductor field-effect transistors (MOSFET) embedded into the base. Biochemical binding during the sensing process leads to the mechanical deflection of the micro-cantilevers, which can be measured and recorded via MOSFET as drain current signals. This technology offers low-noise, high-sensitivity, direct-readout, and microelectronics-compatible bio-chem sensing for various applications, such as parallel on-chip signal sensing, cancer detection, and remote signaling. Applications o Bio-molecular and chemical sensing o Parallel on-chip signal sensing o Biomedical diagnostic, such as cancer detection o Environment monitoring Advantages o Label- and optics-free and All-electronic sensing o Small size o Low noise, high cross sensitivity and direct readout o Compatibility with proven CMOS engineering platform Publications G. S. Shekhawat and V.P. Dravid, "MOSFET-Embedded Microcantilevers for Measuring Deflection in Biomolecular Sensors", Science, 2006, Vol. 311, pp. 1592-1595, DOI: 10.1126/science.112588 IP Status Issued US patents No. 7,157,897, No. 7,759,924 Marketing Contact Arjan Quist , PhD Invention Associate (e) [email protected] (p) (847) 467-0305