Characterization of correlated line edge roughness of nanoscale line gratings using small angle x-ray scattering

Chengqingx Wang, Ronald L. Jones, Eric K. Lin, Wen Li Wu^*, Bryan J. Rice, Kwang Woo Choi, George Thompson, Steven J. Weigand, Denis T. Keane

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review