Characterization of line edge roughness using CD-SAXS

INIS

• x-ray diffraction 100%
• dimensions 80%
• roughness 80%
• scanning electron microscopy 20%
• transmission 20%
• x radiation 20%
• beams 20%
• comparative evaluations 20%
• precision 20%
• values 20%
• height 20%
• wavelengths 20%
• cross sections 20%
• periodicity 20%
• diffraction 20%
• line widths 20%
• width 20%

Engineering

• Critical Dimension 80%
• Edge Roughness 80%
• Wavelength 20%
• Measurement 20%
• Side Wall 20%
• Cross Sections 20%
• Line Width 20%
• Determines 20%
• Measurer 20%
• Transmissions 20%

Physics

• Small-Angle X-Ray Scattering 80%
• X Ray 20%
• Scanning Electron Microscopy 20%
• Periodic Variation 20%
• X Ray Scattering 20%
• Diffraction 20%
• Targets 20%
• Light 20%
• Value 20%
• Width 20%