Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition

D. J. Rogers; F. Hosseini Teherani; C. Sartel; V. Sallet; F. Jomard; P. Galtier; M. Razeghi

doi:10.1117/12.817032

Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition

D. J. Rogers, F. Hosseini Teherani, C. Sartel, V. Sallet, F. Jomard, P. Galtier, M. Razeghi

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.

Original language	English (US)
Title of host publication	Zinc Oxide Materials and Devices IV
DOIs	https://doi.org/10.1117/12.817032
State	Published - Jun 29 2009
Event	Zinc Oxide Materials and Devices IV - San Jose, CA, United States Duration: Jan 25 2009 → Jan 28 2009

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7217
ISSN (Print)	0277-786X

Other

Other	Zinc Oxide Materials and Devices IV
Country/Territory	United States
City	San Jose, CA
Period	1/25/09 → 1/28/09

Keywords

MOCVD
PLD
Regrowth
Template
Zno

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.817032

Cite this

Rogers, D. J., Teherani, F. H., Sartel, C., Sallet, V., Jomard, F., Galtier, P., & Razeghi, M. (2009). Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition. In Zinc Oxide Materials and Devices IV [72170F] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7217). https://doi.org/10.1117/12.817032

@inproceedings{17721b89a8f44151b222df646192acf7,

title = "Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition",

abstract = "The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.",

keywords = "MOCVD, PLD, Regrowth, Template, Zno",

author = "Rogers, {D. J.} and Teherani, {F. Hosseini} and C. Sartel and V. Sallet and F. Jomard and P. Galtier and M. Razeghi",

year = "2009",

month = jun,

day = "29",

doi = "10.1117/12.817032",

language = "English (US)",

isbn = "9780819474636",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Zinc Oxide Materials and Devices IV",

note = "Zinc Oxide Materials and Devices IV ; Conference date: 25-01-2009 Through 28-01-2009",

}

Rogers, DJ, Teherani, FH, Sartel, C, Sallet, V, Jomard, F, Galtier, P & Razeghi, M 2009, Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition. in Zinc Oxide Materials and Devices IV., 72170F, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7217, Zinc Oxide Materials and Devices IV, San Jose, CA, United States, 1/25/09. https://doi.org/10.1117/12.817032

Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition. / Rogers, D. J.; Teherani, F. Hosseini; Sartel, C. et al.

Zinc Oxide Materials and Devices IV. 2009. 72170F (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7217).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition

AU - Rogers, D. J.

AU - Teherani, F. Hosseini

AU - Sartel, C.

AU - Sallet, V.

AU - Jomard, F.

AU - Galtier, P.

AU - Razeghi, M.

PY - 2009/6/29

Y1 - 2009/6/29

N2 - The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.

AB - The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.

KW - MOCVD

KW - PLD

KW - Regrowth

KW - Template

KW - Zno

UR - http://www.scopus.com/inward/record.url?scp=67649197749&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=67649197749&partnerID=8YFLogxK

U2 - 10.1117/12.817032

DO - 10.1117/12.817032

M3 - Conference contribution

AN - SCOPUS:67649197749

SN - 9780819474636

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Zinc Oxide Materials and Devices IV

T2 - Zinc Oxide Materials and Devices IV

Y2 - 25 January 2009 through 28 January 2009

ER -

Rogers DJ, Teherani FH, Sartel C, Sallet V, Jomard F, Galtier P et al. Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition. In Zinc Oxide Materials and Devices IV. 2009. 72170F. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.817032

Characterization of zno thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of zno by metal organic chemical vapor deposition

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Keywords

ASJC Scopus subject areas

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