Characterizing voltage contrast in photoelectron emission microscopy

V. K. Sangwan, V. W. Ballarotto, K. Siegrist, E. D. Williams

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Summary A non-destructive technique for obtaining voltage contrast information with photoelectron emission microscopy is described. Samples consisting of electrically isolated metal lines were used to quantify voltage contrast in photoelectron emission microscopy. The voltage contrast behaviour is characterized by comparing measured voltage contrast with calculated voltage contrast from two electrostatic models. Measured voltage contrast was found to agree closely with the calculated voltage contrast, demonstrating that voltage contrast in photoelectron emission microscopy can be used to probe local voltage information in microelectronic devices in a non-intrusive fashion.

Original languageEnglish (US)
Pages (from-to)210-217
Number of pages8
JournalJournal of Microscopy
Volume238
Issue number3
DOIs
StatePublished - Jun 2010
Externally publishedYes

Keywords

  • Emission microscopy
  • Photoelectron emission microscopy
  • Voltage contrast

ASJC Scopus subject areas

  • Pathology and Forensic Medicine
  • Histology

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