| Original language | English |
|---|---|
| Title of host publication | ASM Handbook |
| Subtitle of host publication | Volume 5, Surface Engineering |
| Place of Publication | Materials Park, OH |
| Publisher | ASM International |
| Pages | 517-531 |
| State | Published - 1994 |
Chemical Vapor Deposition of Semiconductor Materials: Volume 5, Surface Engineering
Research output: Chapter in Book/Report/Conference proceeding › Chapter