@inproceedings{8a470e2c53574474a1a23a80c31ebb78,
title = "Closer to the theoretical limit: Spherical corrections to aplanatic solid immersion imaging with adaptive optics",
abstract = "Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are susceptible to spherical aberration introduced by substrate thickness mismatch. We have developed a wavefront precompensation technique using a MEMS deformable mirror and demonstrated an increase in substrate thickness tolerance in aplanatic SIL imaging. Good agreement between theory and experiment is achieved and spot intensity increases by at least a factor of two to three are demonstrated for thicknesses deviating several percent from ideal. This technique is also capable of fixing aberrations due to SIL fabrication, off-axis imaging and refractive index mismatch.",
author = "Y. Lu and E. Ramsay and Stockbridge, {C. R.} and A. Yurt and K{\"o}kl{\"u}, {F. H.} and Bifano, {T. G.} and {\"U}nl{\"u}, {M. S.} and Goldberg, {B. B.}",
year = "2012",
language = "English (US)",
isbn = "9781615039791",
series = "Conference Proceedings from the International Symposium for Testing and Failure Analysis",
publisher = "ASM International",
pages = "6--10",
booktitle = "ISTFA 2012 - Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis",
note = "38th International Symposium for Testing and Failure Analysis, ISTFA 2012 ; Conference date: 11-11-2012 Through 15-11-2012",
}