CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide

Ter Hoe Loh*, Qian Wang, Keh Ting Ng, Yi Cheng Lai, Seng-Tiong Ho

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

We present a CMOS compatible mass manufacturable, compact Si/SiO 2 multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-Thick Si waveguide. The fiber-To-GRIN lens coupling loss is 2.6 ± 0.3dB (coupling efficiency: 51̃60%) with optimized focal length of 11.6̃11.8μm and Si/SiO2 multilayer thickness of 7.4μm.

Original languageEnglish (US)
Pages (from-to)14769-14778
Number of pages10
JournalOptics Express
Volume20
Issue number14
DOIs
StatePublished - Jul 2 2012

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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