CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide

Ter Hoe Loh; Qian Wang; Keh Ting Ng; Yi Cheng Lai; Seng Tiong Ho

doi:10.1364/OE.20.014769

CMOS compatible integration of Si/SiO₂ multilayer GRIN lens optical mode size converter to Si wire waveguide

Ter Hoe Loh^*, Qian Wang, Keh Ting Ng, Yi Cheng Lai, Seng Tiong Ho

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

We present a CMOS compatible mass manufacturable, compact Si/SiO ₂ multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-Thick Si waveguide. The fiber-To-GRIN lens coupling loss is 2.6 ± 0.3dB (coupling efficiency: 51̃60%) with optimized focal length of 11.6̃11.8μm and Si/SiO₂ multilayer thickness of 7.4μm.

Original language	English (US)
Pages (from-to)	14769-14778
Number of pages	10
Journal	Optics Express
Volume	20
Issue number	14
DOIs	https://doi.org/10.1364/OE.20.014769
State	Published - Jul 2 2012

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Access to Document

10.1364/OE.20.014769

Cite this

@article{ef4a89cb151e4cfaade1d7f407b93902,

title = "CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide",

abstract = "We present a CMOS compatible mass manufacturable, compact Si/SiO 2 multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-Thick Si waveguide. The fiber-To-GRIN lens coupling loss is 2.6 ± 0.3dB (coupling efficiency: 5{\~1}60%) with optimized focal length of 11.{\~6}11.8μm and Si/SiO2 multilayer thickness of 7.4μm.",

author = "Loh, {Ter Hoe} and Qian Wang and Ng, {Keh Ting} and Lai, {Yi Cheng} and Ho, {Seng Tiong}",

year = "2012",

month = jul,

day = "2",

doi = "10.1364/OE.20.014769",

language = "English (US)",

volume = "20",

pages = "14769--14778",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group (formerly OSA)",

number = "14",

}

TY - JOUR

T1 - CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode size converter to Si wire waveguide

AU - Loh, Ter Hoe

AU - Wang, Qian

AU - Ng, Keh Ting

AU - Lai, Yi Cheng

AU - Ho, Seng Tiong

PY - 2012/7/2

Y1 - 2012/7/2

N2 - We present a CMOS compatible mass manufacturable, compact Si/SiO 2 multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-Thick Si waveguide. The fiber-To-GRIN lens coupling loss is 2.6 ± 0.3dB (coupling efficiency: 51̃60%) with optimized focal length of 11.6̃11.8μm and Si/SiO2 multilayer thickness of 7.4μm.

AB - We present a CMOS compatible mass manufacturable, compact Si/SiO 2 multilayer GRIN lens mode size converter from standard single mode fiber to 300nm-Thick Si waveguide. The fiber-To-GRIN lens coupling loss is 2.6 ± 0.3dB (coupling efficiency: 51̃60%) with optimized focal length of 11.6̃11.8μm and Si/SiO2 multilayer thickness of 7.4μm.

UR - http://www.scopus.com/inward/record.url?scp=84863757789&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863757789&partnerID=8YFLogxK

U2 - 10.1364/OE.20.014769

DO - 10.1364/OE.20.014769

M3 - Article

C2 - 22772172

AN - SCOPUS:84863757789

SN - 1094-4087

VL - 20

SP - 14769

EP - 14778

JO - Optics Express

JF - Optics Express

IS - 14

ER -

CMOS compatible integration of Si/SiO₂ multilayer GRIN lens optical mode size converter to Si wire waveguide

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this