CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode-size converter to SOI-based waveguide

Ter Hoe Loh*, Qian Wang, Keh Ting Ng, Yi Cheng Lai, Seng-Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Vertical mode size transformation from 300nm-thick Si-waveguide to 6~7μm, coupling to standard single-mode fiber was demonstrated using CMOS-compatible Si/SiO2 multilayer on-chip GRIN lens (length~11.5μm). Multilayer GRIN lens to fiber coupling loss of 2.9dB was achieved.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2011
StatePublished - Dec 1 2011
EventFrontiers in Optics, FiO 2011 - San Jose, CA, United States
Duration: Oct 16 2011Oct 20 2011

Other

OtherFrontiers in Optics, FiO 2011
CountryUnited States
CitySan Jose, CA
Period10/16/1110/20/11

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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    Loh, T. H., Wang, Q., Ng, K. T., Lai, Y. C., & Ho, S-T. (2011). CMOS compatible integration of Si/SiO2 multilayer GRIN lens optical mode-size converter to SOI-based waveguide. In Frontiers in Optics, FiO 2011