Coherent island formation of Cu2O films grown by chemical vapor deposition on MgO(110)

P. R. Markworth, X. Liu, J. Y. Dai, W. Fan, T. J. Marks, R. P.H. Chang

Research output: Contribution to journalArticlepeer-review

58 Scopus citations

Abstract

Cuprous oxide (Cu2O) films have been grown on single-crystal MgO(110) substrates by a chemical vapor deposition process in the temperature range 690-790 °C. X-ray diffraction measurements show that phase-pure, highly oriented Cu2O films form at these temperatures. The Cu2O films are observed to grow by an island-formation mechanism on this substrate. Films grown at 690 °C uniformly coat the substrate except for micropores between grains. However, at a growth temperature of 790 °C, an isolated, three-dimensional island morphology develops. Using a transmission electron microscopy and atomic force microscope, both dome- and hut-shaped islands are observed and are shown to be coherent and epitaxial. The isolated, coherent islands form under high mobility growth conditions where geometric strain relaxation occurs before misfit dislocation can be introduced. This rare observation for oxides is attributed to the relatively weak bonding of Cu2O, which also has a relatively low melting temperature.

Original languageEnglish (US)
Pages (from-to)2408-2414
Number of pages7
JournalJournal of Materials Research
Volume16
Issue number8
DOIs
StatePublished - Aug 2001

Funding

Funding of this research by the National Science Foundation (Grant CHE-9807042) and use of the Northwestern-MRSEC facilities (Grant DMR-0076097) are greatly appreciated. The authors thank Professor P.W. Voorhees for helpful discussions.

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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