Abstract
Several methods for producing nanocrystalline diamond thin films with electron emission thresholds in the 2-5 volt/micron range are developed. The films are grown in Ar-C60-H2, Ar-CH4, Ar-CH4-H2, Ar-CH4-N2, and N2-CH4 microwave plasmas, and with grain sizes ranging from approximately 5 to 100 nm and differs in morphology and electronic properties. Photoemission yields and STM images indicate that topographically enhanced electric fields may play a role in the low thresholds observed for some of these films; however, for other films, the required field enhancement is much too large to be explained in terms of local surface topography on a diamond surface, but the observed low emission thresholds appear to be associated with enhanced interband state density.
Original language | English (US) |
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Title of host publication | Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC |
Publisher | IEEE |
Pages | 186-187 |
Number of pages | 2 |
State | Published - Dec 1 1998 |
Event | Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC - Asheville, NC, USA Duration: Jul 19 1998 → Jul 24 1998 |
Other
Other | Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC |
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City | Asheville, NC, USA |
Period | 7/19/98 → 7/24/98 |
ASJC Scopus subject areas
- Surfaces and Interfaces