Comparative study of anneal-induced modifications of amorphous carbon films deposited by dc magnetron sputtering at different argon plasma pressures

L. G. Jacobsohn, R. Prioli, F. L. Freire, G. Mariotto, M. M. Lacerda, Yip-Wah Chung

Research output: Contribution to journalConference articlepeer-review

30 Scopus citations

Abstract

This work investigates the evolution of the structural, mechanical and tribological properties of amorphous carbon films (a-C) undergoing thermal annealing. Two different types of a-C film were studied: hard, stressed and dense films, henceforth called 'diamond-like', and soft, more relaxed and less dense films, called 'polymer-like'. The two sets of films were deposited by dc magnetron sputtering at 0.36 and 1.4 Pa argon plasma pressures, respectively, and both were annealed in vacuum for 1 h at temperatures between 300 and 700°C. Raman results provided indications of a remarkable increase of the sp2 hybridized domains, that occurs mainly at temperatures higher than 400°C for the diamond-like films and in a continuous way for the polymer-like films. The friction coefficient of both types of film approaches the same value with increasing temperature, whereas the surface roughness is nearly constant. For diamond-like films, the hardness and compressive internal stress are nearly constant up to 500°C, and then undergo a fast decrease. In contrast, the hardness of the polymer-like film continuously decreases with temperature, whereas the compressive stress remains constant. (C) 2000 Elsevier Science S.A. All rights reserved.

Original languageEnglish (US)
Pages (from-to)680-684
Number of pages5
JournalDiamond and Related Materials
Volume9
Issue number3-6
DOIs
StatePublished - Apr 1 2000
Event10th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide - Prague, Czech Republic
Duration: Sep 12 1999Sep 17 1999

Keywords

  • Amorphous carbon
  • Annealing
  • Film
  • Mechanics
  • Structure
  • Tribology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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