Comparison of interface structure of thin miscible films by grazing incidence x-ray scattering and high-resolution electron microscopy

T. P A Hase, E. M. Ho, J. J. Freijo, S. M. Thompson, A. K. Petford-Long, B. K. Tanner

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Grazing incidence x-ray scattering and cross-sectional high-resolution electron microscopy (HREM) have been applied to the study of thin trilayers of the miscible system Co-Cr-Co grown by ultra-high vacuum evaporation on silicon. Good agreement was found between numerical values for layer thickness deduced by the two techniques. The Co-Cr interface roughness was found to be low with substantial interdiffusion, significantly greater than the roughness amplitude. HREM images confirmed the diffuseness of the interfaces. The roughness had a lateral correlation length of typically 150 Å and a very low fractal parameter h of 0.15. The correlation length was always found to correspond to the lateral grain size observed in the HREM images.

Original languageEnglish (US)
Pages (from-to)A231-A235
JournalJournal of Physics D: Applied Physics
Volume36
Issue number10 A
DOIs
StatePublished - May 21 2003

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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