Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport

V. E. Sandana, D. J. Rogers, F. Hosseini Teherani, R. McClintock, C. Bayram, M. Razeghi, H. J. Drouhin, M. C. Clochard, V. Sallet, G. Garry, F. Falyouni

Research output: Contribution to journalArticle

24 Scopus citations

Abstract

This article compares the forms and properties of ZnO nanostructures grown on Si(111) and c -plane sapphire (c- Al2 O3) substrates using three different growth processes: metal organic chemical vapor deposition (MOCVD), pulsed laser deposition (PLD), and physical vapor transport (PVT). A very wide range of ZnO nanostructures was observed, including nanorods, nanoneedles, nanocombs, and some novel structures resembelling "bevelled" nanowires. PVT gave the widest family of nanostructures. PLD gave dense regular arrays of nanorods with a preferred orientation perpendicular to the substrate plane on both Si and c- Al2 O 3 substrates, without the use of a catalyst. X-ray diffraction (XRD) studies confirmed that nanostructures grown by PLD were better crystallized and more highly oriented than those grown by PVT and MOCVD. Samples grown on Si showed relatively poor XRD response but lower wavelength emission and narrower linewidths in PL studies.

Original languageEnglish (US)
Pages (from-to)1678-1683
Number of pages6
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume27
Issue number3
DOIs
StatePublished - 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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