Composition, structure and tribological properties of amorphous carbon nitride coatings

Dong Li; Eric Cutiongco; Yip Wah Chung; Ming Show Wong; William D. Sproul

doi:10.1016/0257-8972(94)90225-9

Composition, structure and tribological properties of amorphous carbon nitride coatings

Dong Li, Eric Cutiongco, Yip Wah Chung^*, Ming Show Wong, William D. Sproul

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

82 Scopus citations

Abstract

Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp² and sp³), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CN_x coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CN_x coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.

Original language	English (US)
Pages (from-to)	611-615
Number of pages	5
Journal	Surface and Coatings Technology
Volume	68-69
Issue number	C
DOIs	https://doi.org/10.1016/0257-8972(94)90225-9
State	Published - Dec 1994

Funding

This research is supported by the National Science Foundation Surface Engineering and Tribology Program Grant Number MSS—9203239 and the National Storage Industry Consortium/ARPA UHD project. The authors would like to thank Rachel Bain for assistance in using the Raman Facility at Northwestern University, Mr. Xin-ling Yang for assistance in coating deposition and Professor G. Pharr of Rice University for providing nanoindentation results on hard carbon overcoats.

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/0257-8972(94)90225-9

Cite this

@article{5ab162c3933a4f3d9ab04da2bb3c5feb,

title = "Composition, structure and tribological properties of amorphous carbon nitride coatings",

abstract = "Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp2 and sp3), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CNx coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CNx coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.",

author = "Dong Li and Eric Cutiongco and Chung, {Yip Wah} and Wong, {Ming Show} and Sproul, {William D.}",

note = "Funding Information: This research is supported by the National Science Foundation Surface Engineering and Tribology Program Grant Number MSS—9203239 and the National Storage Industry Consortium/ARPA UHD project. The authors would like to thank Rachel Bain for assistance in using the Raman Facility at Northwestern University, Mr. Xin-ling Yang for assistance in coating deposition and Professor G. Pharr of Rice University for providing nanoindentation results on hard carbon overcoats.",

year = "1994",

month = dec,

doi = "10.1016/0257-8972(94)90225-9",

language = "English (US)",

volume = "68-69",

pages = "611--615",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "C",

}

TY - JOUR

T1 - Composition, structure and tribological properties of amorphous carbon nitride coatings

AU - Li, Dong

AU - Cutiongco, Eric

AU - Chung, Yip Wah

AU - Wong, Ming Show

AU - Sproul, William D.

N1 - Funding Information: This research is supported by the National Science Foundation Surface Engineering and Tribology Program Grant Number MSS—9203239 and the National Storage Industry Consortium/ARPA UHD project. The authors would like to thank Rachel Bain for assistance in using the Raman Facility at Northwestern University, Mr. Xin-ling Yang for assistance in coating deposition and Professor G. Pharr of Rice University for providing nanoindentation results on hard carbon overcoats.

PY - 1994/12

Y1 - 1994/12

N2 - Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp2 and sp3), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CNx coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CNx coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.

AB - Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp2 and sp3), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CNx coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CNx coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.

UR - http://www.scopus.com/inward/record.url?scp=0028729965&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028729965&partnerID=8YFLogxK

U2 - 10.1016/0257-8972(94)90225-9

DO - 10.1016/0257-8972(94)90225-9

M3 - Article

AN - SCOPUS:0028729965

SN - 0257-8972

VL - 68-69

SP - 611

EP - 615

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - C

ER -

Composition, structure and tribological properties of amorphous carbon nitride coatings

Abstract

Funding

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this