TY - JOUR
T1 - Composition, structure and tribological properties of amorphous carbon nitride coatings
AU - Li, Dong
AU - Cutiongco, Eric
AU - Chung, Yip Wah
AU - Wong, Ming Show
AU - Sproul, William D.
N1 - Funding Information:
This research is supported by the National Science Foundation Surface Engineering and Tribology Program Grant Number MSS—9203239 and the National Storage Industry Consortium/ARPA UHD project. The authors would like to thank Rachel Bain for assistance in using the Raman Facility at Northwestern University, Mr. Xin-ling Yang for assistance in coating deposition and Professor G. Pharr of Rice University for providing nanoindentation results on hard carbon overcoats.
PY - 1994/12
Y1 - 1994/12
N2 - Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp2 and sp3), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CNx coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CNx coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.
AB - Carbon nitride thin films were synthesized using d.c. unbalanced magnetron sputtering of a high-purity graphite target in a nitrogen-containing plasma onto various substrates held at ambient temperatures. The N/C ratio was found to vary from zero to 0.8 depending on deposition conditions. There was evidence of multiple bonding states for carbon and nitrogen (sp, sp2 and sp3), and the bulk of the film was found to be amorphous. Nanoindentation studies showed that under appropriate substrate bias conditions the carbon nitride coating hardness can be enhanced to levels well above that of conventional amorphous hard carbon coatings. CNx coatings replicate the substrate topography, giving rise to surface roughness equal to or better than the original substrates. Lubricated tribotesting showed the relationship between wear performance and deposition conditions. Under pure sliding in air, the CNx coating provided a 30-fold reduction in wear rate for M2 steels (compared with uncoated M2) under our testing conditions.
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U2 - 10.1016/0257-8972(94)90225-9
DO - 10.1016/0257-8972(94)90225-9
M3 - Article
AN - SCOPUS:0028729965
SN - 0257-8972
VL - 68-69
SP - 611
EP - 615
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - C
ER -