Keyphrases
Tribological Properties
100%
Composition-structure-property Relationship
100%
Deposition Conditions
100%
Nitride Coatings
100%
Amorphous Carbon Nitride
100%
Ambient Temperature
50%
Nitrogen Compounds
50%
Substrate Bias
50%
Nanoindentation
50%
Wear Rate
50%
Bias Conditions
50%
Surface Roughness
50%
Testing Conditions
50%
Wear Performance
50%
Bonding State
50%
M2 High-speed Steel
50%
Coating Hardness
50%
Pure Sliding
50%
Carbon Nitride
50%
Carbon Nitride Film
50%
High-purity Graphite
50%
Graphite Target
50%
C-ratio
50%
Tribotest
50%
Unbalanced Magnetron Sputtering
50%
Multiple Bonding
50%
Substrate Topography
50%
Performance Condition
50%
Hard Carbon Coatings
50%
Material Science
Structure (Composition)
100%
Amorphous Carbon
100%
Carbon Nitride
100%
Magnetron Sputtering
33%
Surface Roughness
33%
Nanoindentation
33%
Film
33%
Thin Films
33%