Computer-controlled four-gun multisubstrate sputtering system for the preparation of composition-modulated structures

H. Q. Yang; B. Y. Jin; Y. H. Shen; H. K. Wong; J. E. Hilliard; J. B. Ketterson

doi:10.1063/1.1138297

Computer-controlled four-gun multisubstrate sputtering system for the preparation of composition-modulated structures

H. Q. Yang^*, B. Y. Jin, Y. H. Shen, H. K. Wong, J. E. Hilliard, J. B. Ketterson

^*Corresponding author for this work

MRC - Materials Research Center

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

We describe a four-gun sputtering system which has been used successfully to prepare composition-modulated structures consisting of amorphous semiconductors and superconducting alloys or binary compounds. The substrates are mounted in ovens which can be individually heated to over 1000°C. The ovens are mounted on a wheel which is driven by a computer-controlled stepping motor. With appropriate programming of the movement of the stepping motor, the deposition sequence is determined.

Original language	English (US)
Pages (from-to)	607-612
Number of pages	6
Journal	Review of Scientific Instruments
Volume	56
Issue number	4
DOIs	https://doi.org/10.1063/1.1138297
State	Published - 1985

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1138297

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abstract = "We describe a four-gun sputtering system which has been used successfully to prepare composition-modulated structures consisting of amorphous semiconductors and superconducting alloys or binary compounds. The substrates are mounted in ovens which can be individually heated to over 1000°C. The ovens are mounted on a wheel which is driven by a computer-controlled stepping motor. With appropriate programming of the movement of the stepping motor, the deposition sequence is determined.",

author = "Yang, {H. Q.} and Jin, {B. Y.} and Shen, {Y. H.} and Wong, {H. K.} and Hilliard, {J. E.} and Ketterson, {J. B.}",

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AU - Yang, H. Q.

AU - Jin, B. Y.

AU - Shen, Y. H.

AU - Wong, H. K.

AU - Hilliard, J. E.

AU - Ketterson, J. B.

PY - 1985

Y1 - 1985

N2 - We describe a four-gun sputtering system which has been used successfully to prepare composition-modulated structures consisting of amorphous semiconductors and superconducting alloys or binary compounds. The substrates are mounted in ovens which can be individually heated to over 1000°C. The ovens are mounted on a wheel which is driven by a computer-controlled stepping motor. With appropriate programming of the movement of the stepping motor, the deposition sequence is determined.

AB - We describe a four-gun sputtering system which has been used successfully to prepare composition-modulated structures consisting of amorphous semiconductors and superconducting alloys or binary compounds. The substrates are mounted in ovens which can be individually heated to over 1000°C. The ovens are mounted on a wheel which is driven by a computer-controlled stepping motor. With appropriate programming of the movement of the stepping motor, the deposition sequence is determined.

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Computer-controlled four-gun multisubstrate sputtering system for the preparation of composition-modulated structures

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