Computer-controlled Multidirectional Ultraviolet Lithography for Integrated Microsystems

Yong-Kyu Yoon, Jungkwun Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of the 2009 NSF Engineering Research and Innovation Conference
State	Published - 2009
Event	Proceedings of the 2009 NSF Engineering Research and Innovation Conference - Duration: Jan 1 2009 → …

Conference	Proceedings of the 2009 NSF Engineering Research and Innovation Conference
Period	1/1/09 → …

Cite this

@inproceedings{1e19e6e9a493473a86a863ec000afba0,

title = "Computer-controlled Multidirectional Ultraviolet Lithography for Integrated Microsystems",

author = "Yong-Kyu Yoon and Jungkwun Kim",

year = "2009",

language = "English",

booktitle = "Proceedings of the 2009 NSF Engineering Research and Innovation Conference",

note = "Proceedings of the 2009 NSF Engineering Research and Innovation Conference ; Conference date: 01-01-2009",

}

TY - GEN

T1 - Computer-controlled Multidirectional Ultraviolet Lithography for Integrated Microsystems

AU - Yoon, Yong-Kyu

AU - Kim, Jungkwun

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - Proceedings of the 2009 NSF Engineering Research and Innovation Conference

T2 - Proceedings of the 2009 NSF Engineering Research and Innovation Conference

Y2 - 1 January 2009

ER -