Conductivity-based contact sensing for probe arrays in dip-pen nanolithography

Jun Zou, David Bullen, Xuefeng Wang, Chang Liu*, Chad A. Mirkin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

The contact sensing method for dip-pen nanolithography was discussed. Dip-pen nanolithography is capable of generating sub-100 nm features using molecular diffusion of chemicals from a scanning probe tip to a writing surface. The results show that this method has high sensitivity and is suitable for dip-pen nanolithography applications with large probe arrays.

Original languageEnglish (US)
Pages (from-to)581-583
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number3
DOIs
StatePublished - Jul 21 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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