Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning

Junyong Park; Jae Hong Park; Eunhye Kim; Chi Won Ahn; Hyun Ik Jang; John A. Rogers; Seokwoo Jeon

doi:10.1002/adma.201003885

Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning

Junyong Park, Jae Hong Park, Eunhye Kim, Chi Won Ahn, Hyun Ik Jang, John A. Rogers, Seokwoo Jeon^*

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

Defect-free and dense micropillar arrays with a high aspect ratio are replicated from etched Si masters using high-modulus polyurethane acrylate. The newly designed conformable solid-index mask can generate high-resolution 3D nanostructures that can be patterned through proximity field nanopatterning (PnP) in a single exposure step. The superb optical property proves the quality of 3D nanostructures.

Original language	English (US)
Pages (from-to)	860-864
Number of pages	5
Journal	Advanced Materials
Volume	23
Issue number	7
DOIs	https://doi.org/10.1002/adma.201003885
State	Published - Feb 15 2011

Keywords

3D nanopatterning
micropillar arrays
nanostructures
optical coatings
phase masks

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
General Materials Science

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10.1002/adma.201003885

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abstract = "Defect-free and dense micropillar arrays with a high aspect ratio are replicated from etched Si masters using high-modulus polyurethane acrylate. The newly designed conformable solid-index mask can generate high-resolution 3D nanostructures that can be patterned through proximity field nanopatterning (PnP) in a single exposure step. The superb optical property proves the quality of 3D nanostructures.",

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AU - Park, Junyong

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AU - Kim, Eunhye

AU - Ahn, Chi Won

AU - Jang, Hyun Ik

AU - Rogers, John A.

AU - Jeon, Seokwoo

PY - 2011/2/15

Y1 - 2011/2/15

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AB - Defect-free and dense micropillar arrays with a high aspect ratio are replicated from etched Si masters using high-modulus polyurethane acrylate. The newly designed conformable solid-index mask can generate high-resolution 3D nanostructures that can be patterned through proximity field nanopatterning (PnP) in a single exposure step. The superb optical property proves the quality of 3D nanostructures.

KW - 3D nanopatterning

KW - micropillar arrays

KW - nanostructures

KW - optical coatings

KW - phase masks

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Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning

Abstract

Keywords

ASJC Scopus subject areas

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